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甚至于

shèn zhì so much (that) / even (to the extent that)
shén variant of
shèn excessive; undue / to exceed; to be more than / very; extremely / (dialect) what; whatever (Taiwan pr. [shen2])
shèn zhì even; so much so that
  zhì to arrive / most / to / until
  zhì as for / as to / to go so far as to
   surname Yu
   to go / to take / sentence-final interrogative particle / variant of
   (of time or place) in; at; on / (indicating any indirect relation) to; toward; vis-à-vis; with regard to; for / (indicating a source) from; out of / (used in comparison) than / (used in the passive voice) by
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